JPH047667U - - Google Patents
Info
- Publication number
- JPH047667U JPH047667U JP4768590U JP4768590U JPH047667U JP H047667 U JPH047667 U JP H047667U JP 4768590 U JP4768590 U JP 4768590U JP 4768590 U JP4768590 U JP 4768590U JP H047667 U JPH047667 U JP H047667U
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- cooling panel
- cooling
- refrigerant
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 5
- 239000003507 refrigerant Substances 0.000 claims description 3
- 238000007689 inspection Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4768590U JPH047667U (en]) | 1990-05-09 | 1990-05-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4768590U JPH047667U (en]) | 1990-05-09 | 1990-05-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH047667U true JPH047667U (en]) | 1992-01-23 |
Family
ID=31563834
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4768590U Pending JPH047667U (en]) | 1990-05-09 | 1990-05-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH047667U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4962869U (en]) * | 1972-09-12 | 1974-06-03 |
-
1990
- 1990-05-09 JP JP4768590U patent/JPH047667U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4962869U (en]) * | 1972-09-12 | 1974-06-03 |